Machine used heated vacuum chuck

Hello,I am interested of buying a heated vacuum chuck for our machine.Holding force is not high.Chuck usable area is ~160 x ~160 mmxmm. overall area about 250x250 mmxmm.We normally heat our current chuck to 180°C / 250°C from room temperature.The chuck flatness should be around 0.01mm.Can you recommend one of your products? BR,Uzi Lavi