Product published by Shandong Jinhong New Materials Co., Ltd.
碳化硅悬臂桨
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Materials and content
碳化硅(SiC)
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Markets
Production Process
Raw Materials
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Powder Preparation
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Molding
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Sintering Process
Reactive Sintering
Processing Technology
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Product Description
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No. 77, Huangshan East Street, Anqiu Economic Development Zone, Weifang City, Shandong Province, China
Business mode
production trade
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Features
反应烧结碳化硅悬臂桨，是半导体晶圆装载系统的关键部件。
悬臂桨性能稳定，在高温环境不变形，晶圆装载量大，适用于机器人自动装载和搬运系统。由于悬臂桨截面稳定不变形，使得利用现有的炉管制备更大规格晶圆成为可能。悬臂桨与LPCVD涂层的热膨胀系数相近，应用于LPCVD，极大地延长了维护清洗周期，并大幅减少污染物。
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