Product published by Jiangsu Sanzhu New Material Technology Co., Ltd.
碳化硅CMP载盘
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Materials and content
碳化硅(SiC)
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Markets
Production Process
Raw Materials
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Powder Preparation
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Molding
Isostatic Pressure Forming
Sintering Process
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Processing Technology
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Product Description
- Model
- Brand
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- Origin
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- Port
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Building A, No.355, Chenjiashan Road, Jiading District, Shanghai,China
Contacts
Features
特点和优势
良好的导热性、低膨胀系数和均温性能。
相比传统的刚玉载盘，缩短上下料加热与冷却时间，提升工作效率；同时可降低上下盘之间磨损，保持良好的平面精度，延长使用寿命约40％。
材料比重小，重量轻，作业人员搬运载盘较容易，降低因搬运困难而造成碰撞破损的风险约20％。
Product Details
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