高纯氧化锆靶材 可按规格图纸定制
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喷涂氧化锆靶材 ZrOx Target
产品说明Product description
以等离子体为热源将相应粉末加热到熔融或半熔融状态并高速冲击背管表面形成致密涂层，从而制备出高纯度、高致密度ZrOx靶材。
With plasma as the heat source, high purity high density ZrOx targets are produced from respective powders, which are heated to molten or semi-molten state and deposited on the surface of backing tube at high speeds to form dense coatings.
氧化锆靶材ZrOx target
| 项目 Item | 参数 Specifications | 检测手段 Testing method |
| 纯度 Purity | ≥99.9% | |
| 密度 Density | ≥5.4 g/cm3 | 阿基米德密度仪Archimedes densimeter |
| 杂质含量 Impurity content |
Al: ≤100 ppm Cr: ≤50 ppm Ti: ≤100 ppm Fe: ≤200 ppm 杂质总和 (Total impurity): ≤1000 ppm |
ICP |
| 电阻率 Electrical resistivity | ≤0.5 Ω∙cm | 四探针电阻率仪Four probe resistivity meter |
背管材质 Backing tube
-选用304/316L不锈钢（无磁）。
304/316L stainless steel (non-magnetic).
靶材尺寸Dimension
-按照图纸要求加工
According to customized drawings.
应用领域Applications
-光学玻璃AR膜系 AR films of optical glasses
-LOW-E镀膜玻璃 LOW-E glasses
-工具镀膜和装饰镀膜 Tool and decorative coatings
背管材质 Backing tube
-选用304/316L不锈钢（无磁）。
304/316L stainless steel (non-magnetic).
靶材尺寸Dimension
-按照图纸要求加工
According to customized drawings.
应用领域Applications
-光学玻璃AR膜系 AR films of optical glasses
-LOW-E镀膜玻璃 LOW-E glasses
-工具镀膜和装饰镀膜 Tool and decorative coatings
贸易信息
| 可接受的付款方式 |
