Product published by Hunan Dingli Technology Co., LTD
碳化硅CVI/CVD沉积炉
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碳化硅CVI/CVD沉积炉技术特征
电阻炉可采用多温区独立控温，温度均匀性好；
采用智能压力调控，压力波动小；
全封闭沉积室，密封效果好，抗污染能力强；
多通道工艺气路，流场均匀，无沉积死角，沉积效果好；
多级高效尾气处理系统，环境友好，易清理；
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