Product published by Jiangsu Sanzhu New Material Technology Co., Ltd.
碳化硅CMP载盘
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Materials and content
碳化硅(SiC)
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Markets
Production Process
Raw Materials
Silicon Carbide (SiC)
Powder Preparation
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Molding
Isostatic Pressure Forming
Sintering Process
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Processing Technology
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Product Description
- Model
- Brand
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- Origin
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- Port
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Building A, No.355, Chenjiashan Road, Jiading District, Shanghai,China
Contacts
Features
特点和优势
良好的导热性、低膨胀系数和均温性能。
相比传统的刚玉载盘,缩短上下料加热与冷却时间,提升工作效率;同时可降低上下盘之间磨损,保持良好的平面精度,延长使用寿命约40%。
材料比重小,重量轻,作业人员搬运载盘较容易,降低因搬运困难而造成碰撞破损的风险约20%。
Product Details
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贸易信息
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