碳化硅悬臂桨

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Materials and content

Production Process

Raw Materials -
Powder Preparation -
Molding -
Sintering Process Reactive Sintering
Processing Technology -

Product Description

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Brand
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Port
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No. 77, Huangshan East Street, Anqiu Economic Development Zone, Weifang City, Shandong Province, China
Business mode production trade
Category -
Production Process
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Features

反应烧结碳化硅悬臂桨,是半导体晶圆装载系统的关键部件。
悬臂桨性能稳定,在高温环境不变形,晶圆装载量大,适用于机器人自动装载和搬运系统。由于悬臂桨截面稳定不变形,使得利用现有的炉管制备更大规格晶圆成为可能。悬臂桨与LPCVD涂层的热膨胀系数相近,应用于LPCVD,极大地延长了维护清洗周期,并大幅减少污染物。

Product Details

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